Depto. de Semicondut. Instrumentos e Fotônica

Trabalhos completos publicados em anais de congressos nacionais

1.

C.Oliveira, P.J.Tatsch e J.W.Swart, ``Remote Plasma Chemical Vapor Deposition of Tungsten'', XI Conference of The Brazilian Microelectronics Society, 1, 417-418, (1996).

2.

J.A.Diniz, P.J.Tatsch, M.A.A.Pudenzi e L.C.Kretly, ``Thin Nitrided-oxide Films formed by Low-energy and Medium Dose Nitrogen Implantation'', XI Conference of The Brazilian Microelectronics Society, 1, 402-407, (1996).

3.

V.Baranauskas, A.C.Peterlevitz e G.I.Surdutovich, ``Fano line shape of the Raman Spectra of Toron-doped Diamond Films with account of Inhomogeneous Broadening'', XIX Encontro Nacional de Física da Matéria Condensada, 113-115, (1996).