Departamento de Eletrônica e Microeletrônica
Artigos em Revistas de Circ. Internac. Espec.
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Edmundo Da Silva Braga, Marco Antonio R. Alves, Alfeu Fissore e Lucila Cescato,
"Óptical Emission End-point Detecting For Monitoring Oxygen Plasma A-c:h Stripping",
Vaccum,
49 (3),
213-215,
(1998).
[74914]
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Edmundo Da Silva Braga, Marco Antonio Alves, Alfeu Fissore e Lucila Cescato,
"Recording Of Relief Structures In Amorphous Hydrogenated Carbon (A-c:h) Films For Infrared Diffractive Optics",
Journal of Modern Optics,
45 (7),
1479-1486,
(1998).
[74917]
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Edmundo Da Silva Braga, Alfeu Fissore, Marco Antonio R. Alves e Lucila Cescato,
"Selective Area Deposition Of A-c:h Films as Masks For Anisotropic Etching Of Crystalline Silicon In Aqueous Potassium Hydroxide",
Vaccum,
49 (1),
49-50,
(1998).
[74937]
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E. C.Rangel, N.C. Cruz, M.A. Bica de Moraes e Luiz Carlos Kretly,
"Influence Of Nitrogen Implantation On The Properties Of Polymer Films Deposited In Benzene Glow Discharges",
Nuclear Instruments & Methods in Physics Research,
141 (1-4),
211-215,
Serie: s/n,
(1998).
[78964]
