Centro de Componentes Semicondutores
Artigos em Revistas de Circ. Internac. Espec.
-
Olga Viatcheslavovna Balachova, Edmundo Da Silva Braga, Marco Antonio Alves, Jacobus Willibrordus Swart e L. Cescato,
"Influence of the substrate thickness and radio frequency on the deposition rate of amorphous carbon alpha - C:H",
Journal of Applied Physics,
85 (1),
3345-3348,
(1999).
[85038]
